Flexure mechanisms have massive range in various industrial application required for high precision and frictionless motion. There are many study on concept to make precision manipulators, but only some of them can achieved to satisfy the high speed with precision. Pro-E software is used for parametric modeling of XY positioning table ANSYS is used for Static analysis and dynamic analysis . Deflection of motion is concluded by static analysis with force. The Deformation of XY mechanism is equivalent to S-shaped cantilever beam deformation. Force and deformation curve is linear. There results get compare with mathematical calculation with FEA results.